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Exhaust gas recirculation systems Edwards Proteus, Atlas, EUVL, EUV, etc.

Exhaust gas recirculation systems will improve process uptime, yield, performance, and safety compliance while seeking to balance often conflicting requirements.

Atlas systems provide exceptional reliability, excellent powder handling, and corrosion resistance, delivering emission reduction efficiencies in the semiconductor industry, flat panel manufacturing, solar industry, and MOCVD.

Proteus systems provide efficient purification of PFCs and other gases that cause global warming, without the use of natural gas or other hydrocarbons.

Smart Thermal Management Solutions systems provide reliable and precisely controlled heating of pre-vacuum and process exhaust pipes to prevent blockage by condensed by-products or residual process materials.

Integrated Regis, EZENITH, EUVL, and EUV systems provide increased productivity, safety, and environmental confidence.

Types of products: Exhaust gas recirculation systems, solutions for reducing carbon dioxide emissions in semiconductor manufacturing, intelligent temperature control solutions, reactive gas injection systems, vacuum and exhaust control solutions for semiconductor processes, vacuum and exhaust control systems.

Models: Atlas TCS, Atlas TPU, Atlas Kronis, Atlas Etch, Atlas Helios.

DOCUMENTS

All Edwards products

The group "New Technologies" offers for review the products of the plant Edwards: vacuum pumping equipment, chemical dry pumps, dry diaphragm pumps, dry cam pumps, dry screw pumps, dry spiral pumps, turbomolecular pumping stations, liquid ring vacuum pumps and compressors, mechanical booster pumps, dry multistage Roots pumps, oil-injected screw pumps, two-stage oil plate rotary pumps, rotarypiston pumps, mechanical turbomolecular pumps, turbomolecular pumps, ultra-high vacuum pumps, direct pressure gauges, indirect pressure sensors, mechanical vacuum meters, switches, vacuum system controllers, vacuum pump controllers, residual gas analyzers, leak detectors, portable vacuum leak detectors, angle valves, gate valves, special valves, built-in valves for vacuum pumps systems
  • Vacuum pumps Edwards
    Vacuum pumps
    EDS, D-Lab, Diffstak, etc.
  • Pumps for the semiconductor industry Edwards
    Pumps for the semiconductor industry
    iXM, iXH, iXL, etc.
  • Exhaust gas recirculation systems Edwards
    Exhaust gas recirculation systems
    Proteus, Atlas, EUVL, EUV, etc.
  • Vacuum measuring devices Edwards
    Vacuum measuring devices
    AIM, Barocel 7000, EJGO, etc.
  • Turbomolecular vacuum pumps Edwards
    Turbomolecular vacuum pumps
    nEXT, T-Station 300, STP, etc.
  • Accessories, spare parts Edwards
    Accessories, spare parts
    housings, fittings, etc.
  • Leak detectors, mass spectrometers Edwards
    Leak detectors, mass spectrometers
    ELD500, PRA, WRA RGA, etc.
  • Valves Edwards
    Valves
    LCPVEKA, AV, BRV, IPVA, etc.
  • Liquid Ring Vacuum pumps Edwards
    Liquid Ring Vacuum pumps
    ELRi, LR1, EHR, SHR, etc.
  • Oil Vacuum Pumps Edwards
    Oil Vacuum Pumps
    EOSi, nES, Ex nES, E2M, etc.
  • Cryopumps, cryochillers, cryocoolers Edwards
    Cryopumps, cryochillers, cryocoolers
    On-Board, MaxCool, Cryo-Torr, etc.

About Edwards

The company Edwards (Great Britain) was founded in 1919 and is a world leader in the field of vacuum and sewage disposal. The company is the main supplier of vacuum equipment to ten of the world's most renowned semiconductor manufacturers.

  • ecology

    The company Edwards strives to minimize the impact of the industries in which the company operates on nature and the environment.

  • scale

    Currently, Edwards has an annual turnover of about $1 billion and employs more than 3,000 people in more than 60 countries. For more than forty years, the company has been present in Asia, where the turnover accounts for 60% of the turnover of the entire company.

  • ACCOUNTABILITY AND SUSTAINABILITY

    The company Edwards creates its products responsibly, ensuring that innovations are sustainable, while at the same time helping to maintain their competitive advantage and operational excellence.

Information Board Edwards

Learn more about our products Edwards.
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    The questionnaire

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